The smart Trick of Noohapou That Nobody is Discussing
The smart Trick of Noohapou That Nobody is Discussing
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The POU3500 technique delivers dynamic temperature Charge of the process chamber cathode / electrode / anode and will be synchronized with any etch process.
Device & TCU application calibration processes vary external examination products not used frequently for verifying
Together with the POU3500, you can realize unprecedented brings about etch performance, chamber uptime, reduced expense of possession and fab space utilization – all though strengthening your process trustworthiness.
at first founded in 1985, our firm has grown into a identified chief in offering temperature Manage methods to the global semiconductor field.
This amazing process, providing a small kind element, inexpensive-of-Ownership and Dynamic Temperature Control presented course of action and equipment engineers a new Instrument to improve their temperature delicate procedures.
The accuracy from the POU 3300 permits impartial Charge of the method fluid check here temperature towards the wafer chuck within +/- 0.1 °C of set stage, as well as rapid response time with the program allows for maximum wafer-to-wafer repeatability through the etch system.
The precision on the POU 3500 permits unbiased Charge of the procedure fluid temperature to your wafer chuck in just +/- 0.1 °C of established point, as well as fast reaction time on the process lets for max wafer-to-wafer repeatability throughout the etch process.
With all the POU3300, you could accomplish unparalleled leads to etch performance, chamber uptime, reduced cost of ownership and fab space utilization – all though strengthening your system dependability.
substantial Footprint: Static units occupy substantial Room in the fabrication Resource place, decreasing its performance.
LAUDA-Noah is Assembly these new challenges and has integrated Power saving technological innovation in systems which are friendly to the natural environment and also have a low price to work.
The TEs' can change straight from heating to cooling, or visa-versa. they are able to switch on & off while in the heating or cooling method and can increase or decrease the amount of heating or cooling devoid of switching by any means.
The POU3300 technique offers dynamic temperature Charge of the method chamber cathode / electrode / anode and might be synchronized with any etch course of action.
The reality is usually that legitimate Dynamic Temperature Manage can only be achieved when all five (5) of the subsequent method style and design and installation requirements are met:
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We demand much less cooling/heating capability for the same application being a static TCU as a result of our smaller reservoir quantity.
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